PFPE Lubricants & Electronic Fluorinated Liquids for Semiconductor Manufacturing
Contamination-Free, Cleanroom-Grade Solutions for Wafer Processing, Vacuum Systems & Thermal Control
Exquisite design, selected materials
PFPE Lubricants & Electronic Fluorinated Liquids for Semiconductor Manufacturing
Contamination-Free, Cleanroom-Grade Solutions for Wafer Processing, Vacuum Systems & Thermal Control
Introduction & Industry Pain Points
Semiconductor manufacturing is one of the most demanding industrial environments, where even trace contamination, outgassing, or lubrication failure can lead to yield loss, equipment downtime, and costly process disruptions. Standard lubricants and coolants often fail to meet the strict requirements of cleanrooms, high-vacuum systems, and thermal control processes.
YBS provides a complete portfolio of semiconductor-grade PFPE lubricants, vacuum pump oils, and electronic fluorinated liquids designed to address these critical challenges. Our products offer ultra-low outgassing, chemical inertness, wide temperature stability, and zero contamination risk, making them ideal for wafer processing, semiconductor equipment, vacuum systems, and thermal management applications.
Core Solutions for Semiconductor Processes
High-Vacuum Precision Drive Systems
Designed for vacuum chamber bearings, ball screws, vacuum valves, and glass-to-metal seals, our PFPE greases provide long-lasting, low-outgassing lubrication, making them ideally suited for demanding high-vacuum environments.
Recommended Products:
YBS-5300/YBS-6300S (Direct equivalent to NYETORR 5300、NYETORR 6300S)
Key Advantages: Wide operating temperature range (-75°C to 250°C), extremely low volatility and outgassing, chemical stability, eliminates process contamination, and meets the requirements for the long-term, stable operation of semiconductor vacuum equipment.
Wafer Handling & Precision Motion Systems
For robotic arms, wafer transfer systems, and precision drive platforms, our PFPE greases provide ultra-low friction, cleanroom-safe lubrication.
Recommended Product:
YBS-207 (Direct equivalent to Krytox™ GPL-207)
Key Benefits: 0–150°C operating range, low volatility, high-speed performance, no contamination risk for sensitive wafer processes.
Recommended Product:
YBS-5097R（Direct equivalent to NyeClean 5097R）
Key Benefits: Ultra-low outgassing avoids wafer contamination and ensures high production yield, stable lubrication in wide temperature range prevents abrasion and jamming of moving parts
High-Load & High-Torque Components
For heavy-duty gears, linear motion systems, and high-torque robotic parts in semiconductor manufacturing, our extreme-pressure PFPE greases deliver long-lasting protection.
Recommended Products:
YBS-215 / YBS-216 (Equivalent to Krytox™ GPL-215 / GPL-216)
Key Benefits: Superior anti-wear performance, high load capacity, extended service life under shock loads.
Vacuum Systems & Pump Lubrication
Our vacuum pump oils are engineered for deep vacuum environments, including diffusion pumps, rotary pumps, turbomolecular pumps, and vacuum pumping systems.
Recommended Products:
YBS-VPF Series (Equivalent to Krytox™ VPF 1506/1514/1525/1531XP/16256)
YBS-1301 / 1302 / 1303 (Equivalent to Solvay YL-VAC 06/6, Y14/6, Y16/6, Y25/6)
Key Benefits: Low vapor pressure, stable performance under high vacuum, long service life in critical pumping equipment.
Thermal Control & Immersion Cooling
Our electronic fluorinated liquids provide reliable thermal management for semiconductor manufacturing and testing processes, including wafer cooling, burn-in testing, and high-density electronic cooling.
Recommended Products:
YBS-J7100 / J7200 / J7300 (Equivalent to 3M Novec 7100/7200/7300)
YBS-FC40 (Equivalent to 3M Novec FC40)
YBS-J7500 (Equivalent to 3M Novec 7500)
YBS-3283 (Equivalent to 3M Fluorinert 3283)
Key Benefits: Non-conductive, non-contaminating, stable heat transfer, safe for direct contact with wafers and electronic components.
Harsh Environment & Corrosion Protection
For semiconductor equipment operating in humid or chemically aggressive environments, our PFPE greases provide reliable corrosion protection and long-term lubrication.
Recommended Products:
YBS-227 (Equivalent to Krytox™GPL-223/224/225/226/227 series)
Key Benefits: Resistant to moisture and chemicals, ideal for equipment exposed to cleaning processes or humid conditions.
Tailored Lubricant Solutions For Every Industry Partner
| YBS Product | Equivalent to | Application in Semiconductor |
| YBS-5097R | NyeClean 5097R | Wafer transfer robot bearings, Linear Guides, and Ball Screws |
| YBS-5300 | NYETORR 5300 | High-Vacuum Systems: ground glass joints, pistons, and vacuum seals |
| YBS- 6300S | NYETORR 6300S | Vacuum robot arm bearings, guide rails for OLED/QLED chambers |
| High-Vacuum Systems: ground glass joints, pistons, vacuum valves | ||
| YBS-207 | Krytox™ GPL-207 | Wafer handling systems, precision drive platforms, cleanroom equipment |
| YBS-215 / 216 | Krytox™ GPL-215 / 216 | High-load gears, linear motion systems, high-torque robotic parts |
| YBS-227 | Krytox™ GPL-223/224/225/226/227 | Corrosion protection, humid/chemical environments, pre/post-cleaning lubrication |
| YBS-1107 | Krytox™ GPL-107 | Light-load mechanical parts, small gearboxes, base oil for greases |
| YBS-VPF Series | Krytox™ VPF 1506/1514/1525/1531XP/16256 | Vacuum pump lubrication (diffusion pumps, rotary pumps, vacuum systems) |
| YBS-1301 / 1302 / 1303 | Solvay YL-VAC 06/6, Y14/6, Y16/6, Y25/6 | Rotary pumps, turbomolecular pumps, Roots pumps, vacuum sealing |
| YBS-J7100 / J7200 / J7300 | 3M Novec 7100/7200/7300 | Immersion cooling, high-power thermal management, wafer cooling |
| YBS-FC40 | 3M Novec FC40 | Electronic component cooling, precision instrument thermal control |
| YBS-J7500 | 3M Novec 7500 | Data center and AI server immersion cooling, high-density computing |
| YBS-3283 | 3M Fluorinert 3283 | Wafer testing equipment cooling, power electronic modules, thermal exchange systems |
Contact our semiconductor technical team to discuss your specific equipment and process requirements.
Why Choose YBS for Semiconductor Applications
Semiconductor-Grade Quality Control: Strict batch testing and traceability to ensure consistent performance.
Clean Working Condition Adaptability: Low particle release property fits stringent clean production scenarios, compatible with mainstream semiconductor fabrication equipment.
Custom Formulation Support: Tailored solutions for unique process requirements, including viscosity and performance adjustments.
Stable Supply Chain: Reliable production and delivery to meet the high-volume demands of semiconductor manufacturing.
Complete Technical Documentation: TDS, MSDS, and compliance certificates provided for every product.
Our Series Of Products Used In Semiconductor Industry
High-purity PFPE lubricants and fluorochemicals designed for semiconductor manufacturing. YBS semiconductor Lubrication providing chemical inertness, thermal stability, and ultra-low outgassing to minimize contamination risk in vacuum and high-temperature environments.
Let's Discuss Your Needs.
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